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Electronic GradeTetramethylammonium Hydroxide 25%¡¢20%¡¢ 2.380% ( Developer TMAH )
C.A.S.No. |
75-59-2 |
Freezing point, ¡æ |
<-25.0 |
Molecular formula |
(CH3)4NOH |
Viscosity 25 ¡æ,cst |
2.8 |
Molecular weight |
91.15 |
Density |
1.022 |
Appearance |
Liquid |
Flash point
¨H |
>200 |
Boiling point, ¡æ |
100.0 |
pH |
>13 |
Item |
Unit |
RJ-25 (MAX) |
RJ-20 (MAX) |
RJ-2.380 (MAX) |
Assay |
% |
24.90¡«25.10 |
19.90¡«20.10 |
2.377¡«2.383 |
Color |
Hazen |
5 |
5 |
5 |
CO32- |
ppm |
100 |
100 |
10 |
Cl- |
ppm |
0.1 |
0.1 |
0.1 |
CH3OH |
ppm |
40 |
40 |
10 |
Li |
ppb |
5 |
5 |
1 |
Na |
ppb |
10 |
10 |
1 |
Mg |
ppb |
5 |
5 |
1 |
Al |
ppb |
10 |
10 |
1 |
K |
ppb |
10 |
10 |
1 |
Ca |
ppb |
10 |
10 |
1 |
Cr |
ppb |
5 |
5 |
1 |
Mn |
ppb |
5 |
5 |
1 |
Fe |
ppb |
5 |
5 |
1 |
Ni |
ppb |
5 |
5 |
1 |
Co |
ppb |
5 |
5 |
1 |
Cu |
ppb |
5 |
5 |
1 |
Zn |
ppb |
5 |
5 |
1 |
Mo |
ppb |
5 |
5 |
1 |
Cd |
ppb |
5 |
5 |
1 |
Pb |
ppb |
5 |
5 |
1 |
Ag |
ppb |
5 |
5 |
1 |
Particle ¡Ý0.5um |
Ea/ml |
100 |
100 |
100 |
Usage |
Widely used in electronic industry , especially as positive resister developer, silicon wafer wet etchant and super clean solution for CMP process. |
Storage |
Stored in sealed containers, placed in the shade |
Package |
1000 kg IBC drum, tank car |
Transport Information |
Hazard classification: 8 UN 1835 | |
Add£ºHaixi Road No.8,International Chemical Industrial Park,Zhenjiang New District,Jiangsu Province.
Contact£ºMISS Hu
TEL£º86511-83361155
Fax£º86511-83361155
Mobile£º18261976115
Mail£º[email protected]
Web£ºwww.runjingchem.com
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