Electronic GradeTetramethylammonium Hydroxide
25%¡¢20%¡¢ 2.380% ( Developer TMAH )
C.A.S.NO. |
75-59-2 |
Freezing point, ¡æ |
<-25.0 |
Formula |
(CH3)4NOH |
Viscosity 25¡æ,cst |
2.8 |
MW |
91.15 |
Specific gravity@60 ¨H |
1.022 |
Phase |
Liquid |
Flash point ¨H |
>200 |
Boiling point,¡æ |
100.0 |
pH |
>13 |
Item |
Unit |
RJ-25 (MAX) |
RJ-20 (MAX) |
RJ-2.380 (MAX) |
Assay |
% |
24.90¡«25.10 |
19.90¡«20.10 |
2.377¡«2.383 |
Color |
Hazen |
5 |
5 |
5 |
CO32-(Carbonate) |
ppm |
100 |
100 |
10 |
Cl- (Chloride ) |
ppm |
0.1 |
0.1 |
0.1 |
CH3OH (Methanol) |
ppm |
40 |
40 |
10 |
Li (Lithium) |
ppb |
5 |
5 |
1 |
Na (Sodium) |
ppb |
10 |
10 |
1 |
Mg (Magnesium) |
ppb |
5 |
5 |
1 |
Al (Aluminium) |
ppb |
10 |
10 |
1 |
K (Potassium) |
ppb |
10 |
10 |
1 |
Ca (Calcium) |
ppb |
10 |
10 |
1 |
Cr (Chromium) |
ppb |
5 |
5 |
1 |
Mn (Manganese) |
ppb |
5 |
5 |
1 |
Fe (Iron) |
ppb |
5 |
5 |
1 |
Ni (Nickel) |
ppb |
5 |
5 |
1 |
Co (Cobalt) |
ppb |
5 |
5 |
1 |
Cu (Copper) |
ppb |
5 |
5 |
1 |
Zn (Zinc) |
ppb |
5 |
5 |
1 |
Mo (Molybdenum) |
ppb |
5 |
5 |
1 |
Cd (Cadmium) |
ppb |
5 |
5 |
1 |
Pb (Lead) |
ppb |
5 |
5 |
1 |
Ag (Silver) |
ppb |
5 |
5 |
1 |
Particle ¡Ý0.5um |
Ea/ml |
100 |
100 |
100 |
Usage |
widely used in electronic industry , especially as positive resister developer ,silicon wafer wet etchant and super clean solution for CMP process. |
Storage |
kept in sealed container in shade |
Package |
1000Kg IBC drum |
Shipping Information |
Danger class£º8 UN 1835 |
Add£ºHaixi Road No.8,International Chemical Industrial Park,Zhenjiang New District,Jiangsu Province.
Contact£ºMISS Hu
TEL£º86511-83361155
Fax£º86511-83361155
Mobile£º18261976115
Mail£º[email protected]
Web£ºwww.runjingchem.com |
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