Electronic Chemicals
  Developer TMAH
Quaternary ammonium alkali
  TMAH pentahydrate
  Industrial grade TMAH
  Tetraethylammonium hydroxide(TEAOH)
  Tetrapropylammonium hydroxide(TPAOH)
  Tetrabutylammonium hydroxide(TBAOH)
  Benzyltrimethylammonium hydroxide
Quaternary ammonium salt
  Tetramethylammonium chloride(TMACl)
  Tetraethylammonium chloride(TEACl)
  Tetrapropylammonium chloride(TPACl)
  Tetrabutylammonium chloride(TBACl)
  Benzyltrimethylammonium Chloride
  Tetramethylammonium bromide(TMABr)
  Tetraethylammonium bromide(TEABr)
  Tetrapropylammonium bromide(TPABr)
  Tetrabutylammonium bromide(TBABr)
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Electronic GradeTetramethylammonium Hydroxide
25%¡¢20%¡¢ 2.380% ( Developer TMAH )


C.A.S.No. 75-59-2 Freezing point, ¡æ <-25.0
Molecular formula (CH3)4NOH Viscosity 25 ¡æ,cst 2.8
Molecular weight 91.15 Density 1.022
Appearance Liquid Flash point
¨H
>200
Boiling point, ¡æ 100.0 pH >13

Item Unit RJ-25 (MAX) RJ-20 (MAX) RJ-2.380 (MAX)
Assay % 24.90¡«25.10 19.90¡«20.10 2.377¡«2.383
Color Hazen 5 5 5
CO32- ppm 100 100 10
Cl- ppm 0.1 0.1 0.1
CH3OH ppm 40 40 10
Li ppb 5 5 1
Na ppb 10 10 1
Mg ppb 5 5 1
Al ppb 10 10 1
K ppb 10 10 1
Ca ppb 10 10 1
Cr ppb 5 5 1
Mn ppb 5 5 1
Fe ppb 5 5 1
Ni ppb 5 5 1
Co ppb 5 5 1
Cu ppb 5 5 1
Zn ppb 5 5 1
Mo ppb 5 5 1
Cd ppb 5 5 1
Pb ppb 5 5 1
Ag ppb 5 5 1
Particle ¡Ý0.5um Ea/ml 100 100 100

Usage Widely used in electronic industry ,  especially as positive resister developer, silicon wafer wet etchant and super clean solution for CMP process.
Storage Stored in sealed containers, placed in the shade
Package 1000 kg IBC drum, tank car
Transport Information Hazard classification: 8       UN 1835


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